The main objective of this book is to: (1) provide a complete review of the structures and properties of refractory carbides and nitrides; (2) provide a thorough assessment of the technology, processing, and equipment and systems used in production and R&D, with emphasis on advanced designs; and (3)[...]
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now es[...]